Position Feedback Control for Linear Actuator for Microsyringe Pump Application ☆

In this study, we investigate a microsyringe pump application of a linear actuator using a position feedback control with and without a tuning gain KP. The slider pushes the microsyringe directly in step motion with nanometer resolution that repels a very small volume of liquid (pL). Experimental results show that the liquid volume was direct propotion to the slider’s stroke. The repeled liquid volume was better linear when using the feedback control with the the tuning gain KP compared to that without KP; it was due to no overshoot and no ossilation of the slider/piston. These results intent to a significant implementation in MEMS of the linear actuator.